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Pinhole Detector in Insulating Films

IP.com Disclosure Number: IPCOM000069436D
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Bogardus, EH Hildenbrand, WW Lane, R [+details]

Abstract

The figure illustrates a device 2 that permits the observation of flaws in passivating films on either metal or silicon substrates that have openings through them. For example, the substrates may be ink jet nozzle arrays which have openings etched through them.