Plasma Confining Screen for Triode Sputter Apparatus
Original Publication Date: 1978-May-01
Included in the Prior Art Database: 2005-Feb-20
As shown in the figure, a triode sputtering apparatus includes a filament block 1 for providing a source of electrons, a gas inlet 2 for inserting a gas, an anode 3 for accelerating the electrons released by the filament 1 to support a low-voltage plasma discharge, a target 4, and an electrically isolated confinement structure 5 which encloses the filament 1, the target 4, and the anode 3 for confining and directing the discharge to the target 4. A plasma is sustained by the action of the accelerated electrons attaining sufficient energy to ionize the gas atoms by collision. The plasma is shaped and directed to the target 4 by the electrically isolated confinement structure 5. When a negative voltage is applied to the target 4, positively charged ions are extracted from the plasma and accelerated to the surface of the target.