Bistable Micromechanical Storage Element in Silicon
Original Publication Date: 1978-May-01
Included in the Prior Art Database: 2005-Feb-20
As shown in the cross-sectional view of the drawing, a device 10 having bistable properties consists of a thin metal layer 12 on an SiO(2) membrane 14 that is attached on both ends to an epitaxial layer of silicon 16. The center 18 of the SiO(2) membrane 14 is flexible and in spaced relation to a P+ type silicon layer 20 due to the well 22.