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Compact Devices Using Conductive Graphite Line Patterns

IP.com Disclosure Number: IPCOM000069592D
Original Publication Date: 1978-May-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Bargon, J Charlton, JL Hiraoka, H [+details]

Abstract

Highly conductive graphite-type lines can be formed on a substrate such as silicon from poly(2-chloroacrylonitrile), or from a carbohydrate such as sugar or cellulose, or functionalized cellulose such as nitrocellulose. A resist pattern is first made in the conventional way, using electron beams or photons, and the resist is converted to carbon, either by baking or, in the case of carbohydrates, by dehydration.