Browse Prior Art Database

Automatic Pressure Control of Mixed Gases Disclosure Number: IPCOM000069626D
Original Publication Date: 1978-May-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue


Related People

Silano, P [+details]


A feedback control system is shown for maintaining a desired constant pressure in a dynamic sputtering chamber 1, where the pressure may vary due to changes in pumping speed, outgassing, etc.