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Delineating Shallow Junctions and Interfaces in Semiconductors Disclosure Number: IPCOM000069634D
Original Publication Date: 1978-May-01
Included in the Prior Art Database: 2005-Feb-21

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Blakeslee, AE Blakeslee, MC [+details]


The delineation of junctions and interfaces in semiconductors in the vicinity of 1 mu of the surface can be enhanced by producing a bevel by etching.