Device Air Transport System
Original Publication Date: 1978-Jun-01
Included in the Prior Art Database: 2005-Feb-21
The figures depict an air track for transporting wafers, devices or other similar light, large area objects. The purpose of the track shown in the figures is to move the object 10 in a selected direction with controlled motion. The method used for propelling the object consists of forcing air through three separate distinct air manifolds 11, 12 and 13, each of which is provided with holes 14. The holes 14 in each of the three air manifolds 11, 12 and 13 are at a predetermined angle and spacing.