Browse Prior Art Database

Recovery of Photoresist Developer

IP.com Disclosure Number: IPCOM000069696D
Original Publication Date: 1978-Jun-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Skarvinko, ER [+details]

Abstract

The recovery of low boiling, nonflammable developers, such as trichoroethylene, can be accomplished by a simple distillation process. The recovery of high boiling combustible solvents is more complicated and costly.