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Recovery of Photoresist Developer Disclosure Number: IPCOM000069696D
Original Publication Date: 1978-Jun-01
Included in the Prior Art Database: 2005-Feb-21

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Skarvinko, ER [+details]


The recovery of low boiling, nonflammable developers, such as trichoroethylene, can be accomplished by a simple distillation process. The recovery of high boiling combustible solvents is more complicated and costly.