Browse Prior Art Database

Arsenic Source for Capsule Diffusion

IP.com Disclosure Number: IPCOM000069763D
Original Publication Date: 1978-Jun-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Briska, M Schmitt, A [+details]

Abstract

Arsenic dissolved in titanium wool or tissue is used as a capsule diffusion source for semiconductor applications, and leads to reduced wafer contamination and more reproducible doping in comparison with conventional arsenic sources.