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Arsenic Source for Capsule Diffusion Disclosure Number: IPCOM000069763D
Original Publication Date: 1978-Jun-01
Included in the Prior Art Database: 2005-Feb-21

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Briska, M Schmitt, A [+details]


Arsenic dissolved in titanium wool or tissue is used as a capsule diffusion source for semiconductor applications, and leads to reduced wafer contamination and more reproducible doping in comparison with conventional arsenic sources.