Conditioning of Electron Beam Evaporation Source for Cr Evaporation
Original Publication Date: 1978-Jul-01
Included in the Prior Art Database: 2005-Feb-21
For some semiconductor metallurgies, an in situ evaporation of Cr followed by Al/Cu is required. The process incorporates a multiple hearth source such as that shown in the IBM Technical Disclosure Bulletin 20, 1738-1739 (October 1977). The multiple hearth source has a plate and shields of stainless steel.