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Conditioning of Electron Beam Evaporation Source for Cr Evaporation

IP.com Disclosure Number: IPCOM000069911D
Original Publication Date: 1978-Jul-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Brainard, EJ Pelella, AL [+details]

Abstract

For some semiconductor metallurgies, an in situ evaporation of Cr followed by Al/Cu is required. The process incorporates a multiple hearth source such as that shown in the IBM Technical Disclosure Bulletin 20, 1738-1739 (October 1977). The multiple hearth source has a plate and shields of stainless steel.