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Baffle/Ballast Suppress Tank Disclosure Number: IPCOM000069916D
Original Publication Date: 1978-Jul-01
Included in the Prior Art Database: 2005-Feb-21

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Juras, AJ Oldakowski, CC [+details]


In a vacuum system used, for example, in conjunction with a reactive ion etching tool, the turbomolecular pump can be damaged when the foreline vacuum, such as about 10 microns, is lost abruptly and a peak pressure wave of about 750 microns results, causing damage to the blades of the turbomolecular pump.