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Concentric Variable Conduction Valve Disclosure Number: IPCOM000069929D
Original Publication Date: 1978-Jul-01
Included in the Prior Art Database: 2005-Feb-21

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Coghlan, RK [+details]


A valve is described which allows for close tolerance pressure control over a broad range of gas flow in vacuum systems. This is achieved by changing the diameter of the opening from 0 to 100% with a high degree of resolution.