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Anodizing Device Wafers

IP.com Disclosure Number: IPCOM000069957D
Original Publication Date: 1978-Jul-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Briska, M Schmitt, A [+details]

Abstract

The apparatus for simultaneously anodizing four wafers consists of two anodes facing each other and a cathode arranged between them, and is immersed in the anodizing solution. The anodes essentially comprise two tantalum (Ta) wafer chucks each, against whose surface one wafer is vacuum-sucked at a time, forming a conducting connection. The cathode consists of a quartz glass plate around which a Ta or Pt wire is wrapped.