Anodizing Device Wafers
Original Publication Date: 1978-Jul-01
Included in the Prior Art Database: 2005-Feb-21
The apparatus for simultaneously anodizing four wafers consists of two anodes facing each other and a cathode arranged between them, and is immersed in the anodizing solution. The anodes essentially comprise two tantalum (Ta) wafer chucks each, against whose surface one wafer is vacuum-sucked at a time, forming a conducting connection. The cathode consists of a quartz glass plate around which a Ta or Pt wire is wrapped.