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Method of Producing Very Thin Oxide Layers on Substrates

IP.com Disclosure Number: IPCOM000069958D
Original Publication Date: 1978-Jul-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Kaus, G Kemp, J Seybold, D [+details]

Abstract

To grow homogeneously composed, thin oxide layers, oxygen ions are implanted into the substrate.