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Method of Producing Highly Pure Chemicals

IP.com Disclosure Number: IPCOM000069959D
Original Publication Date: 1978-Jul-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Bohg, A Briska, M [+details]

Abstract

In integrated semiconductor technology and the chemical trace analysis used therefor, chemicals are required which are frequently not commercially available with the high purity desired.