Original Publication Date: 1978-Jul-01
Included in the Prior Art Database: 2005-Feb-21
The sensitivity of SIMS (Secondary Ion Mass Spectroscopy) increases with the number of secondary ions 6 reaching mass spectrometer 1 (taking, for example, the form of an analyzer). The secondary ions are produced by beam 5 of primary ions impinging upon target 4. The sensitivity is known to be improved when electrostatic energy filter 2 is placed at the entrance of the mass analyzer. As a result of the collecting effect of the electrostatic fields of the filter, a greater number of detectable secondary ions are available. Target 4 and the plates of the energy filter are connected to various electric potentials V; metal housing 7 is grounded.