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Measuring Ultra Thin Films By Auger Electron Spectroscopy

IP.com Disclosure Number: IPCOM000069970D
Original Publication Date: 1978-Jul-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Brandeis, C Kaus, G Kempf, J Schmid, G [+details]

Abstract

Conventional methods for measuring the thickness of an opaque thin film on a substrate (e.g., by X-ray absorption) are limited to films > 30 angstroms. The use of Auger electrons for this purpose is impaired by their sensitivity to surface contaminations.