Measuring Ultra Thin Films By Auger Electron Spectroscopy
Original Publication Date: 1978-Jul-01
Included in the Prior Art Database: 2005-Feb-21
Conventional methods for measuring the thickness of an opaque thin film on a substrate (e.g., by X-ray absorption) are limited to films > 30 angstroms. The use of Auger electrons for this purpose is impaired by their sensitivity to surface contaminations.