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Fabricating Rib Supported Vacuum Deposition Masks Out of Metal

IP.com Disclosure Number: IPCOM000070054D
Original Publication Date: 1978-Jul-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Hammer, R Rasile, J [+details]

Abstract

Rib-supported masks, fabricated out of graphite by air abrasion techniques, have been used successfully for depositing gas panel metallurgy by sputtering [*]. Such masks allow depositing metal patterns directly in a single vacuum deposition step with lines as narrow as .004 inch. Fabrication of graphite masks with apertures narrower than .004 inch poses a number of problems since graphite is chemically inert and mechanical machining is necessary.