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Full Wafer/Probe Card Manipulator for Confined Areas

IP.com Disclosure Number: IPCOM000070090D
Original Publication Date: 1978-Aug-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Birmingham, F Blanchet, FC Chamberlain, RN [+details]

Abstract

This article describes a wafer/probe card manipulator especially designed for wafer/probe card manipulation inside an electron microscope chamber. This permits probing of full wafers within a confined space.