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Full Wafer/Probe Card Manipulator for Confined Areas Disclosure Number: IPCOM000070090D
Original Publication Date: 1978-Aug-01
Included in the Prior Art Database: 2005-Feb-21

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Birmingham, F Blanchet, FC Chamberlain, RN [+details]


This article describes a wafer/probe card manipulator especially designed for wafer/probe card manipulation inside an electron microscope chamber. This permits probing of full wafers within a confined space.