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Balanced Force Vibration Isolating Vacuum Coupling

IP.com Disclosure Number: IPCOM000070141D
Original Publication Date: 1978-Aug-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Oldakowski, CC Wojtaszek, MR [+details]

Abstract

An apparatus is disclosed for coupling vacuum pumps to an electron beam system which reduces vibration and eliminates unbalance\ forces normally inherent in single vacuum bellows couplings.