Browse Prior Art Database

Balanced Force Vibration Isolating Vacuum Coupling Disclosure Number: IPCOM000070141D
Original Publication Date: 1978-Aug-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue


Related People

Oldakowski, CC Wojtaszek, MR [+details]


An apparatus is disclosed for coupling vacuum pumps to an electron beam system which reduces vibration and eliminates unbalance\ forces normally inherent in single vacuum bellows couplings.