Method for Leak Detection of Sealed Modules
Original Publication Date: 1978-Aug-01
Included in the Prior Art Database: 2005-Feb-21
A common method for measuring the leak rate of a module is to fill the module with 1.6 atmospheres of He and measure effusion with a single ion monitor composed of a double focusing magnetic sector mass spectrometer tuned to respond to m/e 4 only. This is an adequate method for determining the helium leak rate of a module, but it tells nothing of the ingress of atmospheric gases.