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Method for Leak Detection of Sealed Modules

IP.com Disclosure Number: IPCOM000070201D
Original Publication Date: 1978-Aug-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Bagwell, TK Carr, TW [+details]

Abstract

A common method for measuring the leak rate of a module is to fill the module with 1.6 atmospheres of He and measure effusion with a single ion monitor composed of a double focusing magnetic sector mass spectrometer tuned to respond to m/e 4 only. This is an adequate method for determining the helium leak rate of a module, but it tells nothing of the ingress of atmospheric gases.