Micromechanical Threshold Temperature Sensor
Original Publication Date: 1978-Aug-01
Included in the Prior Art Database: 2005-Feb-21
A micromechanical threshold temperature sensor 10 is shown in the figure. The sensor 10 has an electrode in the form of a cantilever beam 12 which is an insulating membrane, such as SiO(2), coated with a relatively thin metal, for example, Cr-Au, layer. The beam 12 has a plated gold end metal portion 14.