Bottom Contact Micromechanical Switching Geometry
Original Publication Date: 1978-Aug-01
Included in the Prior Art Database: 2005-Feb-21
A bottom contact micromechanical switch 10 is shown in cross section in Fig. 1 and in a top view in Fig. 2. The switch 10 has a contact electrode 12 and a deflection electrode 14 on top of a cantilever beam 16. The beam 16 is an insulating membrane, such as SiO . The beam 16 is positioned over a well 18 which has been anisotropically etched in a (100) silicon epitaxial layer 19a that has been grown on a B-doped silicon substrate 19. The contact electrode 12 has an end plated metal portion 20 protruding through an opening 17 in the beam 16 to form a contact region 22. The surface of the well 18 may be plated with a metal layer 24.