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Propagation of Large Amplitude Surface Perturbations during LPE Growth

IP.com Disclosure Number: IPCOM000070254D
Original Publication Date: 1978-Aug-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Botez, D Potemski, RM Small, MB Zory, PS [+details]

Abstract

Liquid phase epitaxial (LPE) growth of a layer on a surface having perturbations generally results in a new surface on the grown layer having perturbations of less amplitude. It has now been learned in theory that decay of perturbations of predetermined periodicity may be prevented by controlling the LPE growth rate. This is particularly useful in growing buried layers having controlled lateral structure over longitudinally grooved or otherwise structured substrates.