Control of Edge Build Up in Etching and Ion Milling
Original Publication Date: 1978-Aug-01
Included in the Prior Art Database: 2005-Feb-21
This article pertains to making a plurality of thin film structures composed of layers of Ta Au and Ta upon a substrate 10 (Fig. 1) from a planar sandwich of Ta, Au and Ta layers 11, 12, and 13, respectively.