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Control of Edge Build Up in Etching and Ion Milling

IP.com Disclosure Number: IPCOM000070255D
Original Publication Date: 1978-Aug-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Krongelb, S [+details]

Abstract

This article pertains to making a plurality of thin film structures composed of layers of Ta Au and Ta upon a substrate 10 (Fig. 1) from a planar sandwich of Ta, Au and Ta layers 11, 12, and 13, respectively.