Self Aligned Double Lift Off Process
Original Publication Date: 1978-Sep-01
Included in the Prior Art Database: 2005-Feb-21
This lift-off technique enables a self-aligned sealed structure to be deposited using only a single-mask alignment step. A deposited structure results which has its edges sealed by a second deposited layer which can be used, for example, as a passivation layer. Use of the technique enables the use of materials which are normally not self-passivating to be used in high-density integrated circuits where mask alignment is critical.