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Interchangeable Sandwich Type Rotatable Pole Pieces

IP.com Disclosure Number: IPCOM000070339D
Original Publication Date: 1978-Sep-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Jung, G [+details]

Abstract

The analyzing magnet of an ion beam system is formed with pole tips containing a rotatable insert, as shown in Fig. 1, so that the deflecting radius can be adjusted by movement of the flat portion of the insert. To change the rotatable insert of Fig. 1, the entire analyzing magnet must be removed, which is very time consuming.