Browse Prior Art Database

Cartridge Carrier

IP.com Disclosure Number: IPCOM000070342D
Original Publication Date: 1978-Sep-01
Included in the Prior Art Database: 2005-Feb-21

Publishing Venue

IBM

Related People

Authors:
Brown, RE Corozine, NR Kostenko, A Lee, GE [+details]

Abstract

This article describes a means of transporting wafer cartridges between and within lines in a closed and contamination-free environment.