Browse Prior Art Database

Article Transfer/Cleaning/Inspection Station Disclosure Number: IPCOM000082850D
Original Publication Date: 1975-Feb-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 41K

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Related People

Rajac, TJ [+details]


Semiconductor wafers are processed with improved yields by reduced surface contamination, during transfer/cleaning and inspection operations. An enclosed transfer apparatus permits inspection and wafer cleaning to occur in a clean atmosphere, while wafers are transferred from one carrier to another carrier.