Exposure/Inspection Interface Utilizing Indexed Sequential Access Method On a PC Local Area Network
Original Publication Date: 1990-Jun-01
Included in the Prior Art Database: 2005-Mar-16
This article describes a system that eliminates the necessity for manufacturing operators to fill out logsheets containing critical test exposure data. Through the use of Indexed Sequential Access Method (ISAM) files, test wafer inspection priority, based on a first-in, first- out scheme, is maintained.