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Rotating Probe Assembly With Z Motion

IP.com Disclosure Number: IPCOM000101265D
Original Publication Date: 1990-Jul-01
Included in the Prior Art Database: 2005-Mar-16
Document File: 2 page(s) / 74K

Publishing Venue

IBM

Related People

Authors:
Elenius, P Funk, S Kolan, H [+details]

Abstract

Disclosed is a device for the alignment and placement of semiconductor chips and capacitors to multilayer ceramic substrates. It has independent Z motion for five probes in a 60 mm span with a 0.0002 mm accuracy and repeatability for each probe.