Pyrolytic Boron Nitride Heater with Integrated Thin Film Termocouple
Original Publication Date: 1993-Dec-01
Included in the Prior Art Database: 2005-Mar-21
Disclosed is a novel integrated thin film thermocouple for in-situ temperature measurements. A Pyrolytic Boron Nitride (PBN) electric heat device for elevated temperatures can be integrated with a thin film layer of Pt/Pt-Rh thermocouple material either by sputtered or electrochemical deposited material. Thickness of the material can be from a few microns to a few mils. Photolithography defines the thin film lines and contact closure point. The thermal compatibility for these materials is good. This coating comprises the thin film thermocouple device that will be covered with a protective layer.