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Integrated Substrate Carrier and Handling Fixture

IP.com Disclosure Number: IPCOM000108299D
Original Publication Date: 1992-May-01
Included in the Prior Art Database: 2005-Mar-22
Document File: 3 page(s) / 88K

Publishing Venue

IBM

Related People

Authors:
Elenius, P Weindelmayer, F [+details]

Abstract

Disclosed is a device to handle and store substrates in a clean room environment.