Scanning Kelvin Probe Force Microscope and its Use in Failure Analysis for Locating Defects
Original Publication Date: 1992-Sep-01
Included in the Prior Art Database: 2005-Mar-24
The Scanning Kelvin Probe Force Microscope (SKPFM) is a powerful new instrument that allows for the simultaneous measurement of surface potentials and surface topography. This is achieved with very high resolution (10 nm laterally and 0.5 nm vertically) in a noncontact/nondestructive manner under ambient conditions on either conductive or nonconductive materials.