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Scanning Kelvin Probe Force Microscope and its Use in Failure Analysis for Locating Defects Disclosure Number: IPCOM000109691D
Original Publication Date: 1992-Sep-01
Included in the Prior Art Database: 2005-Mar-24
Document File: 1 page(s) / 37K

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Hwang, T Nonnenmacher, M OBoyle, MP Wickramasinghe, HK [+details]


The Scanning Kelvin Probe Force Microscope (SKPFM) is a powerful new instrument that allows for the simultaneous measurement of surface potentials and surface topography. This is achieved with very high resolution (10 nm laterally and 0.5 nm vertically) in a noncontact/nondestructive manner under ambient conditions on either conductive or nonconductive materials.