Browse Prior Art Database

Mechanically Amplified Piezoresistive SFM Sensor

IP.com Disclosure Number: IPCOM000112081D
Original Publication Date: 1994-Apr-01
Included in the Prior Art Database: 2005-Mar-26
Document File: 2 page(s) / 29K

Publishing Venue

IBM

Related People

Authors:
Bayer, T Greschner, J Nonnenmacher, M [+details]

Abstract

Disclosed is a Scanning Force Microscopy (SFM) sensor with an integrated mechanically amplified piezoresistive sensing technique.