The following operators can be used to better focus your queries.
( ) , AND, OR, NOT, W/#
? single char wildcard, not at start
* multi char wildcard, not at start
(Cat? OR feline) AND NOT dog?
Cat? W/5 behavior
(Cat? OR feline) AND traits
Cat AND charact*
This guide provides a more detailed description of the syntax that is supported along with examples.
This search box also supports the look-up of an IP.com Digital Signature (also referred to as Fingerprint); enter the 72-, 48-, or 32-character code to retrieve details of the associated file or submission.
Concept Search - What can I type?
For a concept search, you can enter phrases, sentences, or full paragraphs in English. For example, copy and paste the abstract of a patent application or paragraphs from an article.
Concept search eliminates the need for complex Boolean syntax to inform retrieval. Our Semantic Gist engine uses advanced cognitive semantic analysis to extract the meaning of data. This reduces the chances of missing valuable information, that may result from traditional keyword searching.
At the deep trench dry etching step, a quartz clamp ring is usually used to maintain the resist patterned S/C wafer.
English (United States)
This text was extracted from an ASCII text file.
100% of the total text.
Flaming the Clamp Ring at Deep Trench Etching Step to
At the deep
trench dry etching step, a quartz clamp ring is
usually used to maintain the resist patterned S/C wafer.
it has been observed that the bottom surface of
the ring is rough. This causes the
resist layer to be removed when
the ring is unloaded, thus resulting in a damaged resist layer which
is a potential source of contamination.
is proposed to flame-polish the quartz clamp
ring to smooth the bottom surface. As a
result, the resist layer is
no longer damaged, the contamination is significantly reduced and the
utilization time increased.