Robotic Mask Pellicle Placement System for a Class 10 Clean Room Environment
Original Publication Date: 1991-Dec-01
Included in the Prior Art Database: 2005-Apr-04
Harper, BM: AUTHOR [+4]
This article describes a tool mechanism which is designed to operate automatically within a Class 10 clean room environment and controls particle-producing mechanisms, reduces operator intervention, error recovery and down time.
Robotic Mask Pellicle Placement System for a Class 10
describes a tool mechanism which is designed
to operate automatically within a Class 10 clean room environment and
controls particle-producing mechanisms, reduces operator
intervention, error recovery and down time.
is a top view of the tool mechanism disclosed
herein. The tool is a self-contained unit consisting of a base
structure upon which a top mounting plate is attached.
Sub-assemblies are mounted to the plate including a robot with a
choice of interchangeable end-of- arm-tooling, a mask cassette nest,
a mask alignment rotation fixture, an option of various size
pellicles and a light curtain system for safety. Vertically mounted
under the base plate and not shown are the controls consisting of a
central processing unit to drive the robot, a personal computer which
coordinates and drives the tool, an RS-232 card which allows the tool
to interface with a host system, a self- contained vacuum system,
pneumatic valves and numerous strategically placed sensors.
mounting plate on the base is designed to prevent
undesirable air turbulence which causes settled particles to become
air-born. This is accomplished by adding cut-outs located close to
sub-assemblies. This eliminates an area for particle accumulation on
the mounting plate and allows the rapid downward flow of clean air to
flow through the top mounting plate undisturbed.
The robot is
designed to operate in a Class 10 clean room
environment. The robotic end-of-arm-tooling consists of an automatic
tool changer with an assortment of grippers to pick and place masks
and pellicles. The mask sizes range from 3.50 inches to 8.00 inches,
and one parallel gripper will accommodate the various mask sizes.
There are three types of pellicles (round, square and Phillips).
However, there are numerous sizes of each type which have to be dealt
with. A unique gripper is required for each pellicle. An end-of-
arm-tool rack is mounted on the top mounting plate, within the work
envelope of the robot, allowing convenient tool changes, as required.
All sub-assemblies are strategically located in the work-cell so that
the robot can maneuver without having to violate the air space over
the masks or pellicles.