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Browse Prior Art Database

Multi-placement Substrate Alignment Assembly

IP.com Disclosure Number: IPCOM000122690D
Original Publication Date: 1991-Dec-01
Included in the Prior Art Database: 2005-Apr-04
Document File: 2 page(s) / 82K

Publishing Venue

IBM

Related People

Carufe, PR: AUTHOR [+4]

Abstract

Disclosed is a fixture for use in aligning a metal mask and substrate prior to evaporation of metals onto a substrate. Use of this fixture solves the misalignment problems encountered in previously manually assembled fixtures and substrates.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 56% of the total text.

Multi-placement Substrate Alignment Assembly

      Disclosed is a fixture for use in aligning a metal mask
and substrate prior to evaporation of metals onto a substrate. Use of
this fixture solves the misalignment problems encountered in
previously manually assembled fixtures and substrates.

      The assembly scheme is shown in Figure 1.  First, a metal mask
is inserted into the can.  Mask alignment with the can is assured
through the use of two alignment pins on the can located at opposite
corners.  One of the alignment pins on the mask is slotted to
compensate for different coefficients of thermal expansion between
the two different materials of the fixture (stainless steel) and mask
(molybdenum).  This is to prevent warping of the mask during heat-up
of the assembly by the evaporation process.

      Next, the substrate is placed on top of the mask.  The
substrate is not aligned to the mask by butting two edges of the part
against alignment pins for the  mask, as was the case with the old
assembly (see Figure 2).  It is, in a sense, "free-floating," so that
as the stainless steel expands, movement of the substrate is
minimized.  In the previous fixture, contact points at the vlier pins
and asymmetry of the pressure arm could shift the part out of
alignment during thermal expansion.

      The substrate is then aligned by two jaws which manipulate the
part through slots located at two opposite corners of the can.  The
substrate can be positioned...