Method for a polisher under-tool slurry arm detent
Publication Date: 2005-Nov-14
The IP.com Prior Art Database
Disclosed is a method for an under-tool slurry arm detent. Benefits include improved functionality and improved performance.
Method for a reflexion polisher under-tool slurry arm detent
Disclosed is a method for an under-tool slurry arm detent with improved reflexion. Benefits include improved functionality and improved performance.
Maintaining a consistent slurry arm position is important for copper chemical mechanical planarization (CMP). Variations in the slurry arm position affect product quality. Adjusting the position of the slurry arm requires opening the production machine (tool). As a result, a lengthy qualification process must be completed before returning the tool to production.
Conventionally, the reflexion polisher includes an under-tool slurry arm detent that enables four slurry arm positions. With the detent, the tool must be opened and the arm moved before the it can be locked into position.
An inside-the-tool slurry arm detent is available. To access the detent, the tool must be opened. The detent is difficult to reposition. Additionally, it enables 1/4" or more variation in the slurry arm positioning.
The disclosed method includes a detent with a fixed portion attached to the underside of the tool near the slurry arm entry location. The method uses existing Allen screw holes. The movable portion of the detent replaces the conventional stainless steel detent that comes with the tool. Both pieces require different length screws but no other modification to the tool is required (see Figure 1).