Portable Gantry base for stabilizing a microscope with X-Y-Z adjustments used on a wafer probing station
Publication Date: 2013-Aug-20
The IP.com Prior Art Database
Disclosed is a design for a multi-legged base for stabilizing a microscope with X-Y-Z adjustments used on a wafer probing station.
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Portable Gantry base for stabilizing a microscope with X -Y-Z adjustments used on a wafer probing station
Most wafer prober microscope holders are comprised of a single post or arm that has a long lever and allows X-Y-Z adjustments. This design is subject to vibration (e.g., from floor vibration or other physical sources) and instability due to the length of the arm. In addition, as pad dimensions shrink, the need for higher magnification causes focusing problems due to diminishing focal length and prober vibration. A method is needed to reduce the vibration.
Figure 1: Current wafer prober microscope design
A multi-legged base is more stable and can reduce vibration. The invented design implements two or more columns set close to the viewing area. This reduces the effects on the lever. Leg bases can be magnetic, bolted down, or held by vacuum to make the columns stable.
Figure 2: Columns implemented for stability
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In addition, the lever length is shortened. This modification, along with the multiple supports, reduces the microscope vibration and enables the use of higher magnifications. The X-Y-Z adjustments are necessary to hone the viewing position, which may change in placement and change in magnification.