Liquid Separation from TEL Developer Exhaust
Publication Date: 2013-Sep-27
The IP.com Prior Art Database
Disclosed is an apparatus that enables liquid separation from a Tokyo Electron Ltd. (TEL) developer exhaust. The solution is a liquid separator box that is placed under the TEL developer with an exhaust duct from the tool connecting to the top of the box to capture liquid Tetramethylammonium hydroxide (TMAH). This eliminates events of leakage, which lead to system damage, safety hazards, and product defects. The apparatus allows regular service and maintenance of the developer modules.