The IQ application will be unavailable on Sunday, November 24th, starting at 9:00am ET while we make system improvements. Access will be restored as quickly as possible.
Browse Prior Art Database

Liquid Separation from TEL Developer Exhaust

IP.com Disclosure Number: IPCOM000231111D
Publication Date: 2013-Sep-27

Publishing Venue

The IP.com Prior Art Database


Disclosed is an apparatus that enables liquid separation from a Tokyo Electron Ltd. (TEL) developer exhaust. The solution is a liquid separator box that is placed under the TEL developer with an exhaust duct from the tool connecting to the top of the box to capture liquid Tetramethylammonium hydroxide (TMAH). This eliminates events of leakage, which lead to system damage, safety hazards, and product defects. The apparatus allows regular service and maintenance of the developer modules.