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Automated Whole Wafer Imaging Inspection

IP.com Disclosure Number: IPCOM000234582D
Publication Date: 2014-Jan-20

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method to reduce the manual processes, and thus the potential for handling defects, for inspecting whole wafers. The novel method uses facial recognition software that is trained to identify the definition of a properly processed whole wafer image versus a defective wafer image.