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Method for improving EUV Source Power Output (double droplets)

IP.com Disclosure Number: IPCOM000238365D
Publication Date: 2014-Aug-20
Document File: 1 page(s) / 21K

Publishing Venue

The IP.com Prior Art Database

Related People

Seth Kalson: ATTORNEY


Increase EUV source uptime and collector lifetime Preferred embodiment: A flow of gas is created into the tin catcher. At the same time, a signficant pumping is supplied at the end of the tin catcher. This flow of gas pushes the hydrocarbons back into the tin catcher for pumping. In the preferred embodiment, 5 - 20 sim of H2 is supplied into the tin catcher, and at least 20% of overall vessel pumping is done through the tin catcher as shown in the figure. Other embodiments can include: 1. Lower than 5sim or higher than 20sim flow of H2 2. Lower or higher percentage of pumping 3. Number of holes for H2 gas flow introduction can vary widely between 1 and 100 holes 4. Holes geometry can also vary widely, the preferred geometry is with the openings directed inside the tin catcher 5. Hole diameter can also vary signficantly from 0.5mm to 10 mm and larger 6. Gases other than H2 can be used (for example, Ar)

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