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A method for Delay sensitivity computation of Wire segments in Multipatterning Disclosure Number: IPCOM000238870D
Publication Date: 2014-Sep-23
Document File: 1 page(s) / 35K

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The Prior Art Database


The proposed method evaluates the sensitivity of delay through path elements(segments/vias/cells) by evaluating the sensitivity of resistance and capacitance of elements to variations in manufacturing associated with two or more masks in multi patterning and how changes in the dimensions of the path segments patterned by multiple masks can be factored in the delay sensitivity equation of segments in a particular path.

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A method for Delay sensitivity computation of Wire segments in Multipatterning

1. The sensitivity cancellation by altering elements of the path is performed one layer at a time and independent of each other; the layers at which the optimization is aimed are ones which will be double patterned and by extension multi patterned. Altering of elements here refers to the change of width and length of the respective elements as patterned by the relevant masks. During

physical design, this can be performed by altering the wire codes and length of wire segments and Vias. This will change the coloring aware parasitics extracted which can then be used in the equation as described later.

2. For an example formulation, the following Elmore delay formula can by used RC Delay (D) =


 

3. The delay sensitivity of elements per mask are subject to two kinds of variations:
a. The independent width variation of wires patterned with the respective masks; represented by qA for mask A and qB mask B
b. The alignment error of the masks; Eg. For a double patterned design, since the capacitance between adjacent wires is dependent on the relative alignment of the patterns, the separate alignment errors of the two patterns can be reduced to a single relative alignment error, qAB

4. The general Elmore RC delay sensitivity formulation is provided by the following

where P is the path, N is a net in the path, P,N is the delay through the path P source to sink connection of...