HIGH-PERFORMANCE DIFFERENTIAL COPLANAR TRANSMISSION LINE A FOR MACH ZEHNDER MODULATOR DESIGN IN LOW RESISTIVITY SUBSTRATE SILICON PHOTONIC PROCESSES
Publication Date: 2018-Jan-24
The IP.com Prior Art Database
The present disclosure relates to a differential coplanar transmission line for a Mach Zehnder modulator design in silicon photonic processes. The differential coplanar transmission line includes weakly coupled differential Radio Frequency (RF) lines and two ground planes on the sides. The weakly coupling differential structure leads to reduced RF loss in the loaded transmission line. Furthermore, the overall area of the transmission line is smaller than the Ground-Signal (GS) counterpart. The modulator design enables implementation of high bandwidth traveling wave Mach-Zehnder modulators in Si Photonic process with a low resistivity substrate and reduces the crosstalk both between modulator arms and between channels.