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New Edge Placement Error (EPE) paradigm for OPC of curved shapes

IP.com Disclosure Number: IPCOM000255457D
Publication Date: 2018-Sep-27

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a new paradigm to calculate Edge Placement Error (EPE) and move edges in applications that need curved shapes to be active areas or gate areas in semiconductor chips. This method optimizes optical proximity correction (OPC) based on area EPE.