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FDSOI - Pre Channel Implantation to Mitigate SOI Implant Damage

IP.com Disclosure Number: IPCOM000257284D
Publication Date: 2019-Jan-29

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed are a structure and method to mitigate silicon on insulator (SOI) implant-related channel damage by integrating Well and Vt implantation before channel formation.