Dismiss
InnovationQ and the IP.com Prior Art Database will be updated on Sunday, June 23, from 9am-noon ET. You may experience brief service interruptions during that time.
Browse Prior Art Database

A Method to Form VTFET Bottom Spacer

IP.com Disclosure Number: IPCOM000258777D
Publication Date: 2019-Jun-12
Document File: 4 page(s) / 69K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method to form a Vertical Tunnel Field Effect Transistor (VTFET) bottom spacer by depositing a sacrificial protection spacer formation.