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Tunable RMG CD for FinFET Technology

IP.com Disclosure Number: IPCOM000260331D
Publication Date: 2019-Nov-12

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method to form tunable Replacement Metal Gate (RMG) critical dimension (CD) for different xtors to improve the MG filling margin and increase the effective RMG CD.